|
Item
|
Compound
|
Density
g/cc
|
Melting Point oC
|
Evaporation
Temperature oC
|
Base Material
Temperature oC
|
Reflective Index
|
Suggested
Deposition
Sources
|
|
1
|
Al2O3
|
4.0
|
2020
|
2100
|
250
|
1.8uv, 1.63v, 0.73ir
|
W, E-Beam
|
|
2
|
Sb2O3
|
5.2
|
656
|
300
|
|
2.2uv, 2.0v, 2.4ir
|
Al2O3, Pt, E-Beam
|
|
3
|
Bi2O3
|
8.9
|
820
|
1400
|
150
|
1.91v
|
Pt, Mo
|
|
4
|
Cr2O3
|
5.2
|
2435
|
2000
|
|
2.5v
|
W, E-Beam
|
|
5
|
Dy2O3
|
8.2
|
2340
|
Ca. 2200
|
|
|
W, E-Beam
|
|
6
|
Er2O3
|
8.6
|
2390
|
Ca. 2200
|
|
|
W, E-Beam
|
|
7
|
Ga2O3
|
5.9
|
1900
|
|
|
|
W
|
|
8
|
GEO2
|
6.2
|
1086
|
|
|
|
Al2O3, SIO2, W, Mo, Ta, E-Beam
|
|
9
|
HfO2
|
9.7
|
2812
|
2500
|
250
|
1.8uv, 1.79v
|
Ta, E-Beam
|
|
10
|
Ho2O3
|
8.4
|
2405
|
Ca. 2200
|
|
|
W, E-Beam
|
|
11
|
In2O3
|
7.2
|
1900
|
600
|
250
|
2v
|
W, Pt
|
|
12
|
ITO
|
7.2
|
Ca. 1900
|
600
|
|
2v
|
W, Pt
|
|
13
|
La2O3
|
6.6
|
2250
|
1500
|
|
1.95v, 1.86ir
|
W, Ta, E-Beam
|
|
14
|
MgO
|
3.6
|
2800
|
1600
|
|
1.73v
|
W,E-Beam
|
|
15
|
Nd2O3
|
7.3
|
2272
|
1400
|
250-300
|
1.79-2.15at0.55u
|
E-Beam
|
|
16
|
Pr6O11
|
6.8
|
Ca.2050
|
1900
|
|
1.9v
|
W, E-Beam
|
|
17
|
Sm2O3
|
7.1
|
2325
|
1900
|
|
1.9v
|
W, E-Beam
|
|
18
|
Sc2O3
|
3.8
|
2300
|
2400
|
|
1.90at0.30u
|
Nb, Mo,W
|
|
|
|
|
|
|
|
1.89at0/55u
|
E-Beam
|
|
|
|
|
|
|
|
1.86at0.9u
|
|
|
19
|
siO2
|
2.3
|
1710
|
1600
|
200
|
1.46uv,1.46v,1.44ir
|
|
|
20
|
SiO
|
2.1
|
1702
|
1100(sub)
|
|
2.0v,1.7ir
|
W, Ta, E-Beam
|
|
21
|
Ta2O3
|
8.2
|
1800
|
2000
|
175
|
201-205v
|
W, E-Beam
|
|
22
|
ThO2
|
10.0
|
3350
|
2100
|
|
108v,1.75ir
|
E-Beam
|
|
23
|
SnO2
|
6.9
|
1127
|
600(sub)
|
|
2.0V
|
AI2O3, W
|
|
24
|
TiO2
|
4.3
|
1850
|
1500
|
|
2.5v
|
W, Ta, E-Beam
|
|
25
|
TiO
|
4.9
|
1750
|
1700
|
250
|
2.1v
|
Ta,C, E-Beam
|
|
26
|
Ti2O3
|
4.6
|
2130
|
1800
|
|
2.5v
|
W, E-Beam
|
|
27
|
Ti3O5
|
4.6
|
1750
|
1800-2000
|
|
2.35(500nm)
|
W, E-Beam
|
|
28
|
Y2O3
|
5.0
|
2415
|
2400
|
250-300
|
1.79v
|
C, Ta, E-Beam
|
|
29
|
ZrO2
|
5.6
|
2700
|
2200
|
|
2.1v, 2.0ir
|
W, E-Beam
|
|
30
|
BaF2
|
4.9
|
1280
|
700
|
|
1.5uv,1.47v,1.44ir
|
W, Ta, E-Beam
|
|
31
|
CaF2
|
3.2
|
1360
|
120
|
|
1.4v, 1.3ir
|
W, Ta, Mo, SiO2
|
|
32
|
HIF4
|
7.1
|
Ca.1000
|
1200
|
|
1.40v
|
E-Beam
|
|
33
|
LaF3
|
5.9
|
1493
|
900
|
|
1.59v,1.57ir
|
W, Ta, Mo, E-Beam
|
|
34
|
LiF
|
2.6
|
870
|
1180
|
|
1.36v,1.29ir
|
W, Ta, Mo, E-Beam
|
|
35
|
MgF2
|
3.2
|
1266
|
950
|
|
1.38v,1.35ir
|
W, Ta, Mo, E-Beam
|
|
36
|
ThF4
|
6.3
|
900
|
800
|
175
|
1.52at10.6u
|
Ta, E-Beam
|
|
|
|
|
|
|
|
1.36at10.6u
|
|
|
37
|
CdS
|
4.8
|
1750
|
-700(sub)
|
|
2.6v,2.2ir
|
W, Ta, Mo, E-Beam
|
|
38
|
ZnS
|
4.1
|
1830
|
1000(sub)
|
|
2.35v,2.2ir
|
Ta, Mo, SiO2
|
|
39
|
ZnSe
|
5.4
|
1526
|
700
|
150
|
2.5v
|
W, Ta, Mo, SiO2
|
|
40
|
Hydrophobic
|
|
360
|
360-450
|
|
1.50-0.55um
|
Mo, E-Beam
|
|
